The Dutch company SolmateS is developing a piezoelectric deposition machine that will use pulsed laser technology to deposit PbZrTiOx (PZT) thin films on wafers. The system is designed to process customised PZT compositions.
Piezoelectric layers are used in miniaturised systems where precise actuation is needed, for instance in radiofrequency MEMS components and micropumps.
Piezoelectric layers are typically deposited by wet processing. The PiezoFlare 1200 under development promises to be less expensive and more reliable than wet processing, according to the company. The technology was developed at the University of Twente and enables reliable high-volume PZT thin film deposition.
SolMateS recently received a US$3 million (€2 million) investment from private equity funds Twente Technology Fund and Participatiemaatschappij Oost Nederland (East-Netherlands Holding Company). SolMateS will use the investment to accelerate product development and international expansion of its production system.Camilla Andersson